We must develop user-friendly tools for computerized analysis and simulation to design and manufacture more complicated MEMS. Because to function MEMS must couple between domains of energy, we can simulate and verify a design before building it, but how a device actually performs under real conditions is impossible to simulate completely. Unlike integrated circuits, where we may incorporate algorithms for the design of components into their manufacturing programs that we join with programs to automatically check for errors, current manufacture of MEMS is harder to check.

Comparing MEMS to larger machines helps us understand why. Compared with macro-mechanical devices, MEMS have far fewer rigidly coupled mechanical components. Instead, MEMS components frequently possess an intrinsic springiness or compliance. Manufacturing compliant components allows us to employ structured designs and planar lithographic masking to make compliant parts systematically for predetermined specified transmissions of controlled motion and force. In this way, MEMS devices share many features with VLSI devices. Hence, using a mask design in a manufacturing sequence may aid sequencing designs to simplify the processes.

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